MONOLITHIC SPECTROMETER ARRANGEMENT

摘要

The invention relates to a spectrometer arrangement comprising successively in the light propagation direction:—a converging optical unit (3), designed for focusing and orienting the incident light onto an entrance slit (4), and—an imaging system disposed downstream of the entrance slit (4) and having at least one dispersive element, designed for imaging a dispersion spectrum of the incident light beam (2) onto a spatially resolving detection device. According to the invention, in a spectrometer arrangement of this type—the entrance slit (4) is embodied in a reflective fashion, and—at least the converging optical unit (3), the entrance slit (4) and an imaging grating (5, 13) are combined in a module (1), wherein they—are integrated as components in a monolithic main body (6), or—are embodied as optically active forms or structures on a monolithic main body (6).

主权项

1. Spectrometer arrangement comprising, in light propagation direction,
a converging optical unit (3) configured for bundling and focusing light onto an entrance slit (4), and an imaging system downstream of the entrance slit (4), said imaging system including at least one dispersive element and being configured for imaging a dispersion spectrum of the light onto a spatially resolving detection unit, wherein the entrance slit is designed so as to be reflective, and at least the converging optical unit, the entrance slit and the dispersive element are combined in a module (1), wherein they
are integrated as components in a monolithic main body (6) orare configured as optically active forms or structures on a monolithic main body (6).