A METHOD AND APPARATUS FOR INTERNAL MARKING OF INGOTS AND WAFERS

摘要

A method of marking ingots and wafers using a laser to create fiducial marks in the bulk of the ingot or wafer. Disclosed is a method for creating durable, optically-recognizable fiducial marks for indicating single crystal ingot and wafer orientation and other types of information required by the chips manufacturers. The fiducial marks can be located at a controlled depth inside the silicon ingot or wafer bulk and the fiducial marks can be made of almost any shape.