| 发明名称 |
METHOD FOR ILLUMINATING AN OBJECT FIELD OF A PROJECTION EXPOSURE SYSTEM |
| 摘要 |
The invention relates to a method for illuminating an object field (5) of a projection exposure system (1), in which a partial amount of a first facete (68) is positioned in park positions, said park positions being respectively at a distance from an associated target position, but at most, about a maximum distance dmax. |
| 申请公布号 |
WO2015124553(A1) |
申请公布日期 |
2015.08.27 |
| 申请号 |
WO2015EP53285 |
申请日期 |
2015.02.17 |
| 申请人 |
CARL ZEISS SMT GMBH |
发明人 |
ENDRES, MARTIN;EISENMENGER, JOHANNES;BIELING, STIG;HAUF, MARKUS;WISCHMEIER, LARS;ZIMMER, FABIAN |
| 分类号 |
G03F7/20;G02B26/08 |
主分类号 |
G03F7/20 |
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