FLUID CONTROL DEVICE AND PUMP

摘要

A pump (1) provided with: a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23-26); a piezoelectric element (16) that is laminated on the central part (21) and that causes concentric bending vibration from the central part (21) to the connecting parts (23-26); and a facing plate (13) that is laminated on the frame part (22) and that faces the connecting parts (23-26) with a space therebetween. The vibrating plate (15) has a resonance mode wherein an antinode of vibration is generated for each of the central part (21) and the connecting parts (23-26). The facing plate (13) has a plurality of flow channel holes (39-43) that are positioned so as to face the connecting parts (23-26) and through which a fluid flows.