发明名称 METHOD AND DEVICE FOR MEASURING HIGH-FREQUENCY CURRENT FOR USE IN PLASMA GENERATION DEVICE
摘要 The present invention involves: positioning pick-up coils (41, 42) for which the surface areas are Sout and Sin to the outside and inside of a first line (21) in the center thereof, in a manner such the centers of the two coils are separated from the center axis of the line (21) by an equal distance (r); measuring the induced electromotive force (Vout, Vin) produced by the two pick-up coils (41, 42); and calculating the high-frequency current (I1) flowing through the line (21) by using this formula. I1=(πr/μd){(r+d)(1/2πfSout)Vout-(-r+d)(1/2πfSin)Vin}
申请公布号 WO2015125379(A1) 申请公布日期 2015.08.27
申请号 WO2014JP82387 申请日期 2014.12.08
申请人 NISSIN ELECTRIC CO., LTD. 发明人 ANDO, YASUNORI
分类号 H05H1/00;G01R19/00;H01L21/205;H01L21/3065;H05H1/46 主分类号 H05H1/00
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