发明名称 |
RESIN COMPOSITION, CURED FILM AND PATTERNED CURED FILM FORMED FROM SAME, METHOD FOR PRODUCING CURED FILM, AND METHOD FOR PRODUCING PATTERNED CURED FILM |
摘要 |
A resin composition which contains the following component (a), component (b) and component (c). (a) a polyimide precursor having a structural unit represented by formula (1) (b) a light-exposed surface solubilizing agent (c) a compound that generates radicals by means of irradiation of active light (In formula (1), R1 represents a tetravalent organic group; R2 represents a divalent organic group; and each of R3 and R4 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group or a monovalent organic group having a carbon-carbon unsaturated double bond.) |
申请公布号 |
WO2015125469(A1) |
申请公布日期 |
2015.08.27 |
申请号 |
WO2015JP00732 |
申请日期 |
2015.02.17 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD. |
发明人 |
ONO, KEISHI;ENOMOTO, TETSUYA;TANIMOTO, AKITOSHI;OHE, MASAYUKI;SUZUKI, KEIKO |
分类号 |
G03F7/004;G03F7/027;G03F7/031 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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