发明名称 RESIN COMPOSITION, CURED FILM AND PATTERNED CURED FILM FORMED FROM SAME, METHOD FOR PRODUCING CURED FILM, AND METHOD FOR PRODUCING PATTERNED CURED FILM
摘要 A resin composition which contains the following component (a), component (b) and component (c). (a) a polyimide precursor having a structural unit represented by formula (1) (b) a light-exposed surface solubilizing agent (c) a compound that generates radicals by means of irradiation of active light (In formula (1), R1 represents a tetravalent organic group; R2 represents a divalent organic group; and each of R3 and R4 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group or a monovalent organic group having a carbon-carbon unsaturated double bond.)
申请公布号 WO2015125469(A1) 申请公布日期 2015.08.27
申请号 WO2015JP00732 申请日期 2015.02.17
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD. 发明人 ONO, KEISHI;ENOMOTO, TETSUYA;TANIMOTO, AKITOSHI;OHE, MASAYUKI;SUZUKI, KEIKO
分类号 G03F7/004;G03F7/027;G03F7/031 主分类号 G03F7/004
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