| 发明名称 |
VIBRATOR, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC APPLIANCE |
| 摘要 |
A vibrator according to the invention includes: a substrate; a lower electrode that is formed on the substrate and has a through hole formed therein; an upper electrode that is disposed above the lower electrode so as to be spaced apart from the lower electrode, and includes a protruding portion that protrudes toward the through hole; and a facing portion that is formed on the substrate, and faces the protruding portion. A distance between the facing portion and the protruding portion is smaller than a distance between the lower electrode and the upper electrode. |
| 申请公布号 |
US2015244289(A1) |
申请公布日期 |
2015.08.27 |
| 申请号 |
US201514625164 |
申请日期 |
2015.02.18 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
YOSHIZAWA Takahiko |
| 分类号 |
H02N1/00;B81C1/00;B81B3/00 |
主分类号 |
H02N1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A vibrator comprising:
a substrate; a lower electrode that is formed on the substrate and has a through hole formed therein; an upper electrode that is disposed above the lower electrode so as to be spaced apart from the lower electrode, and includes a protruding portion that protrudes toward the through hole; and a facing portion that is formed on the substrate, and faces the protruding portion, wherein a distance between the facing portion and the protruding portion is smaller than a distance between the lower electrode and the upper electrode. |
| 地址 |
Tokyo JP |
