Electron Microscope and Sample Movement Device

摘要

The present invention is intended to reduce drift in a sample which occurs because of distortion in an O-ring which seals off from the atmosphere a sample chamber in which vacuum is retained. Provided is an electron microscope, wherein a sample holder (2) is inserted in a column (1), comprising: an O-ring (4) which makes airtight the column (1) of the electron microscope and the sample holder (2); a slider tube (30) which slides in the longitudinal direction of the sample holder (2) and positions the sample holder in the longitudinal direction; a bellows (32) which makes airtight the slider tube (30) and the column (1); a means (10) for driving the slider (30) in the longitudinal direction of the sample holder (2); and a holder umping part (40) which positions the sample holder (2) in the longitudinal direction. The electron microscope further comprises a sample movement device which has an elastic material (31) which connects the holder umping part (40) and the slider tube (30).

主权项

1. An electron microscope with a sample holder being inserted into a column, the electron microscope comprising:
an O-ring which makes airtight said column of the electron microscope and said sample holder; a slider tube which slides in a longitudinal direction of said sample holder and performs positioning of the sample holder in the longitudinal direction; a bellows which makes airtight said slider tube and said column; a driving unit which drives the slider tube in the longitudinal direction of the sample holder; a touching member which performs position determination of the sample holder in the longitudinal direction; and a sample movement device which has an elastic material for connection of said touching member and said slider tube.