| 发明名称 |
FUNCTIONAL FILM, LIQUID IMMERSION MEMBER, METHOD OF MANUFACTURING LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD |
| 摘要 |
A mesh member including a base material having a mesh portion and a film of Ti-doped tetrahedral amorphous carbon coated on the mesh portion. An atomic ratio of Ti to C in a composition of the film (ta-C:Ti film) is equal to or greater than 0.03 and equal to or less than 0.09. The atomic ratio of Ti to C is equal to a number of Ti atoms occupying the film divided by a sum of a number of carbon atoms having an sp3 hybrid orbital and a number of carbon atoms having an sp2 hybrid orbital occupying the film. |
| 申请公布号 |
US2015241784(A1) |
申请公布日期 |
2015.08.27 |
| 申请号 |
US201514707454 |
申请日期 |
2015.05.08 |
| 申请人 |
NIKON CORPORATION |
发明人 |
KISHIUME Tsukasa;TAKI Yusuke |
| 分类号 |
G03F7/20;C04B35/52 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A mesh member comprising:
a base material having a mesh portion; and a film of Ti-doped tetrahedral amorphous carbon coated on the mesh portion, wherein: an atomic ratio of Ti to C in a composition of the film (ta-C:Ti film) is equal to or greater than 0.03 and equal to or less than 0.09; and the atomic ratio of Ti to C is equal to a number of Ti atoms occupying the film divided by a sum of a number of carbon atoms having an sp3 hybrid orbital and a number of carbon atoms having an sp2 hybrid orbital occupying the film. |
| 地址 |
Tokyo JP |
