| 摘要 |
An angular acceleration sensor includes a stationary portion, a weight portion, a beam including a flat plate portion, one end portion of the flat plate portion in a lengthwise direction thereof being connected to the stationary portion and the other end portion thereof being connected to the weight portion, a central projection that projects in a thickness direction of the flat plate portion, and that is disposed at a center of the flat plate portion in a widthwise direction thereof, and end-side projections that are disposed at opposite ends of the flat plate portion in the widthwise direction, respectively, and that project in the thickness direction of the flat plate portion, and detection elements that are disposed on the flat plate portion at positions different from a center of the flat plate portion in the lengthwise direction, and that detect stress generated in the beam. |
