| 发明名称 |
MICROELECTROMECHANICAL DEVICE WITH MOTION LIMITERS |
| 摘要 |
A microelectromechanical device that comprises a first structural layer, and a movable mass suspended to a primary out-of plane motion relative the first structural layer. A cantilever motion limiter structure is etched into the movable mass, and a first stopper element is arranged on the first structural layer, opposite to the cantilever motion limiter structure. Improved mechanical robustness is achieved with optimal use of element space. |
| 申请公布号 |
US2015241216(A1) |
申请公布日期 |
2015.08.27 |
| 申请号 |
US201514630763 |
申请日期 |
2015.02.25 |
| 申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
AHTEE Ville;RYTKÕNEN Ville Pekka |
| 分类号 |
G01C19/5712;B81B3/00 |
主分类号 |
G01C19/5712 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microelectromechanical device, comprising:
a first structural layer; a movable mass suspended to a primary out-of plane motion relative the first structural layer; a cantilever motion limiter structure etched into the movable mass, a first stopper element on the first structural layer, disposed opposite to the cantilever motion limiter structure. |
| 地址 |
Nagaokakyo-shi JP |
