POD AND PURGE SYSTEM USING THE SAME

摘要

An object is to prevent the partial pressure of oxidative gas over time in an FOUP mounted on an FIMS system and left open. A surface purge unit is provided on a side opposite to the opening of the FOUP in such a way that wafers supported in the FOUP is located between the opening and the surface purge unit. The surface purge unit ejects inert gas from a plurality of vent holes provided in its surface toward the opening. Uniform purging or replacement of the interior of the FOUP with inert gas can be achieved by creating inert gas flow from an inert gas supply part extending over a surface in the direction from the interior of the FOUP toward the opening along the wafer surface.

主权项

1. A pod comprising:
shelves provided in the interior space, on which narrow plate-like contents, which are arranged along a height direction, are placed respectively; an opening through which the contents are transferred onto/from said shelves from/to outside; a lid that closes said opening to seal said interior space; and a surface purge unit having a surface provided as at least one of inner surfaces of the pod including a surface opposed to said opening and two side surfaces extending between said surface opposed to said opening and said opening or a surface located between said inner surface of the pod and said contents, the surface purge unit ejecting a specific gas from a plurality of vent holes that said surface has toward said contents in a direction parallel to narrow surfaces of said contents arranged along said height direction.