| 发明名称 |
COATING METHOD, COATING DEVICE AND COATING GENERATING SYSTEM |
| 摘要 |
The invention discloses a coating method, a coating device and a coating system. The coating method comprises: collecting a thickness data of a film on inner walls of a coating chamber; and processing the thickness data to obtain the thickness of the film on the inner walls of the coating chamber. With the coating method, the cleaning for the coating device gets smarter, the troublesome of artificially controlling the cleaning in the prior art is eliminated and thus the cleaning efficiency for the coating device is improved. |
| 申请公布号 |
US2015238999(A1) |
申请公布日期 |
2015.08.27 |
| 申请号 |
US201414499641 |
申请日期 |
2014.09.29 |
| 申请人 |
BOE TECHNOLOGY GROUP CO., LTD. ;BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
AI Qingnan;PAN Mengxiao;ZHOU He;LI Yue |
| 分类号 |
B05C9/08;B05D1/00;B05C11/02 |
主分类号 |
B05C9/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A coating method, which comprises a step of coating a substrate to be coated which is placed on a stage in a coating chamber, wherein the method further comprises steps of:
collecting a thickness data of a film coated on inner walls of the coating chamber; and processing the thickness data to obtain a thickness of the film coated on the inner walls of the coating chamber. |
| 地址 |
Beijing CN |
