| 摘要 |
This invention provides an X-ray analysis device and a computer program that make it possible to obtain an X-ray intensity distribution in which the impact of the geometry of the specimen is reduced. Said X-ray analysis device uses a plurality of X-ray detectors to detect X-rays from each part of a specimen (5) exposed to a beam and calculates weighted sums by summing together multiple X-ray intensities each multiplied by a weight coefficient, where said weight coefficients increase monotonically with respect to relative-ratio magnitudes. Using the calculated weighted sums as X-ray intensities for the respective parts of the specimen (5), the X-ray analysis device generates an intensity distribution for the X-rays from the specimen (5). The contribution of X-ray intensities that were attenuated as a result of the geometry of the specimen (5) to the weighted sums of X-ray intensities is small, and said weighted sums are thus close to non-attenuated X-ray intensities. Using the weighted sums as the X-ray intensities for the respective parts of the specimen (5) results in an X-ray intensity distribution in which the impact of the geometry of the specimen (5) is reduced. |
