发明名称 LASER BEAM IRRADIATION APPARATUS AND MANUFACTURING METHOD OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME
摘要 A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.
申请公布号 US2015243934(A1) 申请公布日期 2015.08.27
申请号 US201414510322 申请日期 2014.10.09
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 HAN Gyoo-Wan;KANG Ku-Hyun;LEE Hae-Sook;JEUN Jin-Hong;CHO Kyoung-Seok
分类号 H01L51/56;H01L51/52;G02B27/10;G02B27/14;G02B26/10;G02F1/11 主分类号 H01L51/56
代理机构 代理人
主权项 1. A laser beam irradiation apparatus, comprising: a laser light source; a controller for controlling energy of light generated by the laser light source; a first optical system for adjusting a shape of light emitted from the controller; a scanner for adjusting a direction of light emitted from the first optical system; and an F-theta lens for diminishing a beam emitted from the scanner.
地址 Yongin-City KR