发明名称 |
LASER BEAM IRRADIATION APPARATUS AND MANUFACTURING METHOD OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME |
摘要 |
A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner. |
申请公布号 |
US2015243934(A1) |
申请公布日期 |
2015.08.27 |
申请号 |
US201414510322 |
申请日期 |
2014.10.09 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
HAN Gyoo-Wan;KANG Ku-Hyun;LEE Hae-Sook;JEUN Jin-Hong;CHO Kyoung-Seok |
分类号 |
H01L51/56;H01L51/52;G02B27/10;G02B27/14;G02B26/10;G02F1/11 |
主分类号 |
H01L51/56 |
代理机构 |
|
代理人 |
|
主权项 |
1. A laser beam irradiation apparatus, comprising:
a laser light source; a controller for controlling energy of light generated by the laser light source; a first optical system for adjusting a shape of light emitted from the controller; a scanner for adjusting a direction of light emitted from the first optical system; and an F-theta lens for diminishing a beam emitted from the scanner. |
地址 |
Yongin-City KR |