METHOD FOR MAKING LIGHT EMITTING DIODES

摘要

A method for making a LED comprises following steps. A substrate having a surface is provided. A first semiconductor layer, an active layer and a second semiconductor pre-layer is formed on the surface of the substrate. A patterned mask layer is applied on a surface of the second semiconductor pre-layer. A number of three-dimensional nano-structures is formed on the second semiconductor pre-layer and the patterned mask layer is removed. The substrate is removed and a first electrode is formed on a surface of the first semiconductor layer away from the active layer. A second electrode is formed to electrically connect with the second semiconductor pre-layer.

主权项

1. A method for making a light emitting diode, comprising the following steps:
providing a substrate having a first surface; forming a first semiconductor layer, an active layer, and a second semiconductor pre-layer on the first surface; applying a patterned mask layer on a second semiconductor pre-layer surface, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the second semiconductor pre-layer surface; etching the exposed portion and removing the patterned mask layer to form a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are linear protruding structures, and a cross-section of each linear protruding structure is an arc; removing the substrate to form an exposed first semiconductor layer surface located away from the active layer; covering the exposed first semiconductor layer surface by a first electrode; and electrically connecting a second electrode with the second semiconductor pre-layer.