APPARATUS AND METHOD FOR WEB-BASED TOOL MANAGEMENT

摘要

A method is provided, including: establishing a session over the Internet with a client device, the session configured to provide for remote control or monitoring of a manufacturing tool over the Internet via communication with a controller of the manufacturing tool, the manufacturing tool being one of a plurality of manufacturing tools in a fabrication facility (FAB); receiving a request from the client device to access an equipment model defining a representation of the manufacturing tool, the representation of the manufacturing tool; receiving data from a controller of the manufacturing tool that is stored in association with a service object of the manufacturing tool; sending to the client device, via the session, a response to the request, the response including the data received from the manufacturing tool that is stored in association with the service object.

主权项

1. A method implemented on at least one server computer, comprising:
establishing a session over the Internet with a client device, the client device being one of a plurality of client devices networked via a first local area network (LAN) that is connected to the Internet, the session configured to provide for remote control or monitoring of a manufacturing tool over the Internet via communication with a controller of the manufacturing tool, the manufacturing tool being one of a plurality of manufacturing tools in a fabrication facility (FAB), the manufacturing tools being networked via a second LAN that is connected to the Internet, each of the manufacturing tools having a pre-defined identifier; receiving a request from the client device, via the first LAN, to access an equipment model corresponding to the manufacturing tool, the equipment model defining a representation of the manufacturing tool, the representation of the manufacturing tool including one or more service objects that define services for the manufacturing tool that are capable of being accessed by the client device; receiving data from a controller of the manufacturing tool, via the second LAN, that is stored in association with a service object of the manufacturing tool; sending to the client device, via the session, a response to the request, the response including the data received from the manufacturing tool that is stored in association with the service object.