发明名称 MICROCHIP AND METHOD FOR MANUFACTURING THE SAME
摘要 There is provided a microchip including a plurality of substrate layers, and bonding layers provided at boundary surfaces between the substrate layers and configured to include a silicon compound. At least one of the bonding layers is configured to include an organic silicon compound.
申请公布号 US2015239217(A1) 申请公布日期 2015.08.27
申请号 US201314408498 申请日期 2013.05.09
申请人 Sony Corporation 发明人 Watanabe Hidetoshi;Segawa Yuji;Kato Yoshiaki
分类号 B32B27/08;B32B3/30;B01L3/00;B32B37/12;B32B27/28 主分类号 B32B27/08
代理机构 代理人
主权项 1. A microchip comprising: a plurality of substrate layers; and bonding layers provided at boundary surfaces between the substrate layers and configured to include a silicon compound, wherein at least one of the bonding layers is configured to include an organic silicon compound.
地址 Tokyo JP