发明名称 |
X-RAY INSPECTION SYSTEM, CONTROL METHOD, CONTROL PROGRAM, AND CONTROL DEVICE |
摘要 |
One embodiment of the disclosed X-ray inspection system (10) comprises an X-ray inspection device (100) and a control device (200). The control device (200) has the following: a transformation-function storage unit that stores a mapping between a shape-representing shape parameter and transformation functions; an image generation unit (231) that, on the basis of X-ray information obtained by the X-ray inspection device (100), generates a first X-ray image and a second X-ray image that is the first X-ray image with a higher resolution; a first shape computation unit (232) that, using a given transformation function for computing a shape parameter from image data, computes a shape parameter that represents the shape of an inspection subject in the first X-ray image generated by the image generation unit (231); and a second shape computation unit (233) that uses the shape parameter computed by the first shape computation unit (232) to select a transformation function stored in the transformation-function storage unit and uses the selected transformation function to compute a shape parameter from the second X-ray image. |
申请公布号 |
WO2015125395(A1) |
申请公布日期 |
2015.08.27 |
申请号 |
WO2014JP83726 |
申请日期 |
2014.12.19 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
UMEHARA, YASUTOSHI;KADOSAWA, KATSUJI;NAMIOKA, ICHIRO |
分类号 |
G01B15/04;G01N23/04;H01J35/08 |
主分类号 |
G01B15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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