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发明名称
APPARATUS FOR MEASURING OPTICAL PROPERTY
摘要
<p>제어 수단은 수광부(26)로부터의 검출 출력을 기초로 하여 입사하는 측정광의 광량을 판단하여, 수광부(26)에 입사하는 광량이 소정의 하한값보다 작은 경우에는, 광필터부(22)에 있어서의 감광률을 보다 작은 값으로 절환하고, 수광부(26)에 입사하는 광량이 소정의 상한값보다 큰 경우에는, 광필터부(22)에 있어서의 감광률을 보다 큰 값으로 절환한다.</p>
申请公布号
KR101548017(B1)
申请公布日期
2015.08.27
申请号
KR20080118634
申请日期
2008.11.27
申请人
发明人
分类号
G01J1/02;G01J1/42;G01J3/18;G01J3/50;G01M11/00;H01L33/00
主分类号
G01J1/02
代理机构
代理人
主权项
地址
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