| 发明名称 |
WAFER TRANSPORT SYSTEM |
| 摘要 |
A substrate transport system includes a substrate cart inside a chamber and a linearly driven shuttle outside the chamber configured to levitate the substrate cart into a non contact, spaced relationship with respect to outwardly opposing sides of an interior wall of the chamber and to linearly drive the substrate cart within the chamber. |
| 申请公布号 |
US2015243539(A1) |
申请公布日期 |
2015.08.27 |
| 申请号 |
US201514708644 |
申请日期 |
2015.05.11 |
| 申请人 |
Persimmon Technologies Corporation |
发明人 |
Hosek Martin |
| 分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate transport system comprising:
a chamber; a substrate cart inside the chamber including one or more magnetic arrays configured as nuts; and one or more lead screws coupled to the chamber configured to drive the magnetic arrays to linearly drive the substrate cart within the chamber. |
| 地址 |
Wakefield MA US |
