Surface Property Inspection Apparatus, Surface Property Inspection System, and Surface Property Inspection Method

摘要

To provide a surface property inspection apparatus, surface property inspection system, and surface property inspection method capable of inspecting the surface processing state of processed material subjected to surface processing such as shot-peening, heat treatment, or nitriding with high accuracy and low vulnerability to temperature changes in the inspection environment. Surface property inspection apparatus is furnished with a AC power supply, a AC bridge circuit, and an evaluation device; AC bridge circuit comprises variable resistor with which distribution ratio γ is variable, reference detector, and inspection detector. Inspection detector is furnished with a coil wound so as to oppose the surface property inspection region of object under inspection M, and by supplying AC power from AC power supply to coil, an eddy current is excited in object under inspection M. Thus the magnetic properties of object under inspection M can be detected, and inspection of surface properties based on the output signal from AC power supply is possible.

主权项

1. A surface property inspection apparatus for inspecting surface properties of an object under inspection subjected to surface processing, comprising:
an AC bridge circuit; an AC power supply for supplying AC power to the AC bridge circuit; and an evaluation apparatus for evaluating the surface properties of the object under inspection based on an output signal from the AC bridge circuit; wherein the AC bridge circuit has a variable resistor configured so that the distribution ratio is variable between a first resistor and a second resistor, an inspection detector furnished with a coil for creating an AC magnetic field and exciting an eddy current in the object under inspection, and a reference detector for inspecting a reference state serving as reference for comparing with the output from the inspection detector; and whereby the first resistor, the second resistor, the reference detector, and the inspection detector constitute the AC bridge circuit; and wherein the evaluation apparatus evaluates the surface properties of the object under inspection based on an output signal from the AC bridge circuit, in a state whereby AC power is supplied to the AC bridge circuit, the inspection detector detects an electromagnetic properties of the object under inspection and the reference detector detects a reference state.