COMPACT SUBSTRATE PROCESSING TOOL WITH MULTI-STATION PROCESSING AND PRE-PROCESSING AND/OR POST-PROCESSING STATIONS

摘要

A substrate processing tool includes N substrate processing stations arranged in a first transfer plane around a central cavity, where N is an integer greater than one. At least one of the N substrate processing stations is configured to process the substrate. M substrate processing stations are arranged in a second transfer plane around the central cavity, where M is an integer greater than one. The second transfer plane is arranged parallel to and above the first transfer plane. An upper tool portion includes the M substrate processing stations and a first portion of the N substrate processing stations. A rotatable lower tool portion rotates relative to the upper tool portion. A second portion of the N substrate processing stations rotates with the rotatable lower tool portion.

主权项

1. A substrate processing tool, comprising:
N substrate processing stations arranged in a first transfer plane around a central cavity, where N is an integer greater than one, and wherein at least one of the N substrate processing stations is configured to process the substrate; M substrate processing stations arranged in a second transfer plane around the central cavity, where M is an integer greater than one, and wherein the second transfer plane is arranged parallel to and above the first transfer plane; an upper tool portion including the M substrate processing stations and a first portion of the N substrate processing stations; and a rotatable lower tool portion that rotates relative to the upper tool portion, wherein a second portion of the N substrate processing stations rotates with the rotatable lower tool portion.