Defect Inspection Device and Defect Inspection Method

摘要

A defect-inspection device includes an irradiation unit having an objective-pupil-optical unit that allows illumination light linearly condensed by a first light-condensing unit to pass through, and an objective lens that allows the illumination light having passed through the objective-pupil-optical unit to pass through; an irradiation-position-control unit that controls a passing position of the illumination light in the objective-pupil-optical unit disposed at a pupil surface of the objective lens; a detection unit having a second light-condensing unit that condenses light irradiated by the irradiation unit and generated from a sample, a specular-reflection light-blocking unit that blocks specular-reflection light from the sample and light components generated near the pupil surface among the light beams condensed by the second light-condensing unit, and an image-forming unit that images the light that is condensed by the second light-condensing unit and is not blocked by the specular-reflection light-blocking unit into a detector; and a defect-determination unit that detects a defect on a surface of the sample on the basis of a signal of the image imaged by the image-forming unit.

主权项

1. A defect inspection device comprising:
an irradiation unit having a light source that emits a laser beam, a first light-condensing unit that linearly condenses the laser beam emitted from the light source, an objective pupil optical unit that allows the illumination light linearly condensed by the first light-condensing unit to pass through, and an objective lens that allows the illumination light having passed through the objective pupil optical unit to pass through; an irradiation position control unit that controls a passing position of the illumination light in the objective pupil optical unit disposed at a pupil surface of the objective lens; a detection unit having a second light-condensing unit that condenses light irradiated by the irradiation unit and generated from a sample, a specular reflection light-blocking unit that blocks specular reflection light from the sample and light components generated near the above of the pupil surface among the light beams condensed by the second light-condensing unit, and an image forming unit that images the light that is condensed by the second light-condensing unit and that is not blocked by the specular reflection light-blocking unit into a detector; and a defect determination unit that detects a defect on a surface of the sample on the basis of a signal of the image imaged by the image forming unit.