发明名称 Film Chamber and Method for Leak Detection on a Non-Rigid Specimen
摘要 The invention relates to a method for determining the rate of leakage on a non-rigid specimen, wherein the specimen is introduced to a film chamber which can be evacuated, having at least one wall region made of a flexible material and the pressure in the film chamber is reduced outside of the specimen. The pressure gradient within the film chamber outside of the specimen is measured. In order to increase the accuracy of the leak detection, an outer over-pressure is exerted on the flexible wall region during pressure measurement which exceeds the pressure in the film chamber and outside of the specimen and the pressure inside the specimen.
申请公布号 US2015241298(A1) 申请公布日期 2015.08.27
申请号 US201314432359 申请日期 2013.09.26
申请人 INFICON GMBH 发明人 Decker Silvio
分类号 G01M3/26 主分类号 G01M3/26
代理机构 代理人
主权项
地址 Köln DE