| 摘要 |
Provided are a bearing device and plasma processing apparatus, comprising a base, a base driving mechanism, a pressure ring and a check ring; the base is used to bear a machined workpiece; the base driving mechanism is used to drive the base to ascend to a processing position or descend to an unload position; the pressure ring is used to tightly press the edge area of the machined workpiece placed on the base when the base is in the processing position; the check ring surrounds the outer peripheral wall of the base and is located below the pressure ring; the opposing surfaces of the pressure ring and the check ring comprise a pair of guide ring surfaces, the guide ring surfaces tilting outward at the same angle relative to the center lines in the vertical direction of the base; and when the base driving mechanism drives the base to ascend, the pair of guide ring surfaces mutually contact and move toward each other so as to position the pressure ring and the base. The bearing device of the present invention directly positions the pressure ring and the base, thus improving positioning accuracy, simplifying the work flow and device structure, and reducing manufacturing costs. |
