TUNABLE FILTER STRUCTURES AND DESIGN STRUCTURES

摘要

Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.

主权项

1. A method, comprising:
determining a first resonant frequency of a filter; and loading the filter to change the first resonant frequency to a second resonant frequency different than the first resonant frequency.