| 发明名称 |
SUPER-HYDROPHOBIC THIN FILM AND METHOD FOR PREPARING THE SAME |
| 摘要 |
A super-hydrophobic thin film and a method of preparing the same are provided. The method of preparing the super-hydrophobic thin film involves forming a super-hydrophobic thin film by plasma enhanced chemical vapor deposition (PECVD) on a substrate by using a precursor and a hydrogen gas. |
| 申请公布号 |
US2015240363(A1) |
申请公布日期 |
2015.08.27 |
| 申请号 |
US201414505793 |
申请日期 |
2014.10.03 |
| 申请人 |
Research & Business Foundation Sungkyunkwan University |
发明人 |
HAN Jeongeon;CHOI Yoonseok;JIN Su Bong;LEE Jun Suck |
| 分类号 |
C23C16/50;C23C16/505;C23C16/40 |
主分类号 |
C23C16/50 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of preparing a super-hydrophobic thin film, the method comprising:
forming a super-hydrophobic thin film by plasma enhanced chemical vapor deposition (PECVD) on a substrate by using a precursor and a hydrogen gas. |
| 地址 |
Suwon-si KR |
