发明名称 METHOD FOR CREATING CONTACTS IN SEMICONDUCTOR SUBSTRATES
摘要 Techniques include methods for creating contacts for microchips, solar films, etc., for electrically connecting conductive elements and/or for current spreading. Embodiments herein include using an oversized "board" or contact array positioned between a lower layer and an upper layer. This contact array is created by directed self-assembly (DSA) of block copolymers. The lower and upper layers can have conductive structures such as lines. The oversized board can be comprised of hundreds, thousands, millions (etc.) of small conductive contact cylinders, lines or other vertical structures, with each conductive structure electrically isolated from adjacent conductive structures in the array. A crossover location of a line on a lower level with a line on an upper level is connected with multiple conductive structures located at the cross over location.
申请公布号 WO2015127084(A1) 申请公布日期 2015.08.27
申请号 WO2015US16626 申请日期 2015.02.19
申请人 TOKYO ELECTRON LIMITED;TOKYO ELECTRON U.S. HOLDINGS, INC. 发明人 DEVILLIERS, ANTON, J.
分类号 H01L21/027 主分类号 H01L21/027
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