| 摘要 |
<p>Provided is a zinc oxide-based transparent conductive film comprising zinc atoms, oxygen atoms, and M as defined below, wherein the total number of zinc atoms, oxygen atoms, titanium atoms, gallium atoms, and aluminum atoms accounts for 99% or more of the number of all atoms forming the zinc oxide-based transparent conductive film; the ratio of the total number of titanium atoms, gallium atoms, and aluminum atoms per the total number of zinc atoms, titanium atoms, gallium atoms, and aluminum atoms contained in the film ((number of titanium atoms + number of gallium atoms + number of aluminum atoms)/(number of zinc atoms + number of titanium atoms + number of gallium atoms + number of aluminum atoms) x 100)is 1.3% or greater but 2.0% or less; the number of titanium atoms accounts for at least 50% of the total number of titanium atoms, gallium atoms, and aluminum atoms contained in the film; the carrier electron concentration is 3.60 x 1020cm-3 or less, the mobility is 43.0 cm2/Vs or greater and resistivity is 5.00 x 10-4Ω·cm or less. M represents titanium atoms; titanium atoms and gallium atoms; titanium atoms and aluminum atoms; or titanium atoms, gallium atoms, and aluminum atoms.</p> |
