| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive film element further enhanced in a piezoelectric/electrostrictive characteristics, in a piezoelectric/electrostrictive film element formed on a fired ceramic substrate.SOLUTION: An actuator 10 includes: a fired ceramic substrate 12 formed with a space part 14 opened downward; a first electrode 22 formed on the upper surface of the fired ceramic substrate 12 above the space part 14; a piezoelectric/electrostrictive body 30 formed on the first electrode 22 so that the volume changes with input and output of electric power; and a second electrode 24 formed on the piezoelectric/electrostrictive body 30. The piezoelectric/electrostrictive body 30 contains Pb(ZrTi)Oor (Li,Na,K)(Nb,Ta)Oas a main component and contains crystals oriented along the direction of an electric field. In the actuator 10, the degree of orientation of the piezoelectric/electrostrictive body 30 can be increased regardless of, such as, the orientation of the substrate on which the piezoelectric/electrostrictive body is formed.</p> |
