发明名称 SENSOR SYSTEM FOR LITHOGRAPHY
摘要 A sensor system to measure a physical quantity, the system including a parallel detection arrangement with multiple detectors to allow measurements in parallel at different spatial locations, wherein the multiple detectors share a noise source, wherein the sensor system is configured such that the multiple detectors each output a signal as a function of the physical quantity, and wherein the sensor system is configured such that at least one detector responds differently to noise originating from the shared noise source than the one or more other detectors
申请公布号 EP2909677(A1) 申请公布日期 2015.08.26
申请号 EP20130759242 申请日期 2013.09.10
申请人 ASML NETHERLANDS B.V. 发明人 KOK, HAICO;VOOGD, ROBBERT JAN
分类号 G03F7/20;G03F9/00 主分类号 G03F7/20
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