| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect correction device for a color filter substrate, which is capable of changing the diameter of the tip of a polishing head without replacing the head and shortening correction time, and a defect correction method in which the defect correction device is applied. <P>SOLUTION: A defect correction device for a color filter substrate removes and flattens a minute projection on a substrate to be corrected on which at least a colored layer is formed, by pressing a running polishing tape with a polishing head and making the running polishing tape contact with and slide on the minute projection. The polishing head is provided with a tape polishing mechanism which comprises a structure enabling a gradual change of the contact area of the tip which presses the running polishing tape, and presses the running polishing tape with the polishing head to make the running polishing tape slide on the minute projection while gradually changing the area or the diameter of the tip of the polishing head according to the area of the minute projection which has been preliminary measured. <P>COPYRIGHT: (C)2013,JPO&INPIT |
