| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently conduct cleaning work of a nozzle. <P>SOLUTION: A coating apparatus includes: a coating part having a nozzle where a slit opening discharging a liquid body to a substrate is formed at a tip; a driving part driving at least one of the substrate and the nozzle so that the substrate and the nozzle are relatively moved; a cleaning member formed so as to be inserted into the slit opening; and a cleaning member driving part moving the cleaning member in the longitudinal direction of the slit opening. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
