发明名称 半導体オン・インシュレータ基板を製造する方法
摘要 <p>A semiconductor-on-insulator substrate and a related semiconductor structure, as well as a method for fabricating the semiconductor-on-insulator substrate and the related semiconductor structure, provide for a multiple order radio frequency harmonic suppressing region located and formed within a base semiconductor substrate at a location beneath an interface of a buried dielectric layer with the base semiconductor substrate within the semiconductor-on-insulator substrate. The multiple order radio frequency harmonic suppressing region may comprise an ion implanted atom, such as but not limited to a noble gas atom, to provide a suppressed multiple order radio frequency harmonic when powering a radio frequency device, such as but not limited to a radio frequency complementary metal oxide semiconductor device (or alternatively a passive device), located and formed within and upon a surface semiconductor layer within the semiconductor structure.</p>
申请公布号 JP5771153(B2) 申请公布日期 2015.08.26
申请号 JP20110548551 申请日期 2009.12.04
申请人 发明人
分类号 H01L27/12;H01L21/265;H01L21/336;H01L27/08;H01L29/786 主分类号 H01L27/12
代理机构 代理人
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