EVALUATING APPARATUS FOR QUALITY OF CRYSTAL, AND APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT EMITTING DEVICE WHICH INCLUDE THE SAME

摘要

An evaluating apparatus for quality of a crystal comprises: an optical device capable of measuring surface reflectance of a wafer having a V-pit; and a data processing unit collecting a decrease in the surface reflectance of the wafer measured from the optical device to calculate a threading dislocation density. The purpose of the present invention is to provide the evaluating apparatus for quality of a crystal, and an apparatus and a method for manufacturing a semiconductor light emitting device comprising the same, capable of preventing deterioration of properties of a nitride family semiconductor light-emitting device and reliability deterioration.