珪化バリウム多結晶体、その製造方法ならびに珪化バリウムスパッタリングターゲット

摘要

PROBLEM TO BE SOLVED: To provide a barium silicide polycrystal with high density and free from cracks, and to provide a barium gallium silicide sputtering target.SOLUTION: The barium silicide polycrystal, in which the density is ≥3.0 g/cmand the maximum diameter of silicon coarse grains existing in the barium silicide polycrystal is ≤150 μm, is produced by using barium and silicon powder with average grain diameter of ≤5 mm.