发明名称 METHOD OF MAKING NUCLEATION LAYER FOR DIAMOND GROWTH
摘要 <p>A method for the fabrication of a nucleation layer for the growth of diamond by chemical vapor deposition based on the addition of diamond powder into a solution of a polymer, homogenization of the resulting suspension, deposition of the resulting polymer composite on a substrate, annealing of the fabricated structure to the temperature corresponding to the hardening temperature of the used polymer and etching away of the polymer composite. This procedure gets the substrate ready for the growth of diamond or its ultra-thin layers by chemical vapor deposition. The polymer composite can be deposited in one or more layers. The polymer composite can also be deposited on the substrate selectively using basic lithographic techniques, which leads to the growth of diamond in geometrically predefined patterns on the substrate allowing for the fabrication of layered diamond structures in one technological process.</p>
申请公布号 EP2257658(B1) 申请公布日期 2015.08.26
申请号 EP20090714552 申请日期 2009.02.18
申请人 INSTITUTE OF PHYSICS OF THE AS CR, V.V.I. 发明人 REZEK, BOHUSLAV;VANECEK, MILAN;KROMKA, ALEXANDER;POTOCKY, STEPAN;POTMESIL, JIRI
分类号 C30B29/04;C23C16/02;C23C16/27;C30B25/10;C30B25/18 主分类号 C30B29/04
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