发明名称 非プレーナ型トランジスタのフィン製造
摘要 <p>The present description relates to the field of fabricating microelectronic devices having non-planar transistors. Embodiments of the present description relate to the doping of fins within non-planar transistors, wherein a conformal blocking material layer, such as a dielectric material, may be used to achieve a substantially uniform doping throughout the non-planar transistor fins.</p>
申请公布号 JP5770944(B2) 申请公布日期 2015.08.26
申请号 JP20140533282 申请日期 2011.09.30
申请人 发明人
分类号 H01L21/336;H01L21/265;H01L21/266;H01L29/41;H01L29/417;H01L29/78;H01L29/786 主分类号 H01L21/336
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