Coordinate measuring machine and method for calculating correction matrix by coordinate measuring machine

摘要

A first correction component calculation processing unit (54A) calculates diagonal components of a correction matrix based on first and second detection values. The first and second detection values are obtained by measurement in which a calibration reference body and a probe are moved relatively to each other in a normal direction on a surface of the calibration reference body so as to bring a measurement tip into contact with the surface of the calibration reference body at one point. A second correction component calculation processing unit (54B) calculates non-diagonal components of the correction matrix based on third and fourth detection values. The third and fourth detection values are obtained by scanning measurement using the measurement tip on the surface of the calibration reference body while maintaining a constant relative distance between the center of the measurement tip and a reference point or a reference line of the calibration reference body.