发明名称 |
METHOD FOR PREVENTING METAL CONTAMINATION OF POLYSILICON |
摘要 |
<p>[Problems] To provide a method of preventing the polysilicon from being contaminated with metals by providing a resin cover on the surface of a metal substrate that comes in contact with the polysilicon, wherein the metal surfaces are reliably prevented from being exposed that is caused by the wear of the cover. [Means for Solution] A method of preventing the polysilicon from being contaminated with metals caused by the contact of the polysilicon with a metal substrate by providing a resin cover on the surface of the metal substrate, wherein the resin cover 3 comprises two kinds of resin sheets 3a and 3b overlapped one upon the other.</p> |
申请公布号 |
EP2484635(A4) |
申请公布日期 |
2015.08.26 |
申请号 |
EP20100820388 |
申请日期 |
2010.09.17 |
申请人 |
TOKUYAMA CORPORATION |
发明人 |
KONDOU, MANABU;YOSHIMURA, REIJI |
分类号 |
C01B33/02;B01J19/02;B65D25/14 |
主分类号 |
C01B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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