| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device which makes easier an operation confirmation and maintenance work of a component supply device which can load together wafer pallets and tray pallets.SOLUTION: The device is composed so that a window 31 is installed on a magazine holding 12 housing a magazine vertically movable to check a pickup state of a wafer component 21 on a wafer pallet 22 by a sub-robot 15 from the side of an operator and when the operator checks the pick-up state of the wafer component 21 on the wafer pallet 22 by the sub-robot 15, operation of a confirmation mode that the magazine inside the magazine holding 12 is retreated lower than the window 31 is selectable and further, at the time of maintenance, a shuttle nozzle 26 of a shuttle mechanism 16 is movable to a maintenance position of the side of the operator of the magazine holding 12.</p> |
