发明名称 冷却装置及び冷却装置の使用方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a cooler which can enhance cooling capacity without compromising the reliability even when cooling a semiconductor chip generating a large amount of heat by using a cooling medium, and to provide a usage method of the cooler. <P>SOLUTION: The cooler has a heat receiving part 10 in which a hole 30 capable of passing a cooling medium 52 is formed. The material of the inner surface of the hole in the heat receiving part contains silicon, and a liquid showing reduction against the material of the inner surface of the hole in the heat receiving part is used as the cooling medium. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5768399(B2) 申请公布日期 2015.08.26
申请号 JP20110033548 申请日期 2011.02.18
申请人 发明人
分类号 H01L23/473;H05K7/20 主分类号 H01L23/473
代理机构 代理人
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