<p>A semiconductor device includes a substrate, suspension structures extending from the upper surface of the substrate, and an absorber stack attached to the substrate by the suspension structures. The suspension structures suspend the absorber stack over the substrate such that a gap is defined between the absorber stack and the substrate. The absorber stack includes a plurality of metallization layers interleaved with a plurality of insulating layers. At least one of the metallization layers has a thickness of approximately 10 nm or less.</p>
申请公布号
EP2909591(A1)
申请公布日期
2015.08.26
申请号
EP20130786040
申请日期
2013.10.16
申请人
ROBERT BOSCH GMBH;FEYH, ANDO, LARS;CHEN, PO-JUI;PURKL, FABIAN;YAMA, GARY;O'BRIEN, GARY
发明人
FEYH, ANDO LARS;CHEN, PO-JUI;PURKL, FABIAN;YAMA, GARY;O'BRIEN, GARY