POLYMERIZED FILM FORMING METHOD AND POLYMERIZED FILM FORMING APPARATUS

摘要

The present invention provides a polymerized film forming method capable of forming a film while maintaining a satisfactory heat resistant property even for non-aromatic polyamide. The polymerized film forming method uses a first base gas containing a first monomer and a second base gas containing a second monomer different from the first monomer to form a polymerized film on a target surface of a target body. A di-functional non-aromatic amine having a hydrolyzer is used for the first monomer, and a di-functional acid anhydride is used for the second monomer.