发明名称 |
Solid-state imaging apparatus, manufacturing method for the same, and electronic apparatus |
摘要 |
A solid-state imaging apparatus includes a semiconductor substrate, an upper layer film, and on-chip lenses. On the semiconductor substrate, a plurality of pixels are formed. The upper layer film is laminated on the semiconductor substrate. The on-chip lenses are formed on the upper layer film so as to correspond to the respective pixels. A pupil correction amount of one of the on-chip lenses is changed depending on a distance between a center of a pixel area and the on-chip lens, and depending on a film thickness of the upper layer film at a position of the on-chip lens on the upper layer film. |
申请公布号 |
US9117719(B2) |
申请公布日期 |
2015.08.25 |
申请号 |
US201314035638 |
申请日期 |
2013.09.24 |
申请人 |
SONY CORPORATION |
发明人 |
Saito Hiromasa |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
Sheridan Ross P.C. |
代理人 |
Sheridan Ross P.C. |
主权项 |
1. A solid-state imaging apparatus, comprising:
a semiconductor substrate on which a plurality of pixels is formed; an upper layer film varying in thickness and laminated on the semiconductor substrate; and on-chip lenses formed on the upper layer film so as to correspond to respective pixels, a pupil correction amount of at least one of the on-chip lenses being changed depending on a distance between a center of a pixel area and the at least one on-chip lens, and depending on the film thickness of the upper layer film at a position of the at least one on-chip lens on the upper layer film, wherein the film thickness of the upper layer film at the position of the at least one on-chip lens is the distance between the at least one on-chip lens and the semiconductor substrate. |
地址 |
JP |