发明名称 Solid-state imaging apparatus, manufacturing method for the same, and electronic apparatus
摘要 A solid-state imaging apparatus includes a semiconductor substrate, an upper layer film, and on-chip lenses. On the semiconductor substrate, a plurality of pixels are formed. The upper layer film is laminated on the semiconductor substrate. The on-chip lenses are formed on the upper layer film so as to correspond to the respective pixels. A pupil correction amount of one of the on-chip lenses is changed depending on a distance between a center of a pixel area and the on-chip lens, and depending on a film thickness of the upper layer film at a position of the on-chip lens on the upper layer film.
申请公布号 US9117719(B2) 申请公布日期 2015.08.25
申请号 US201314035638 申请日期 2013.09.24
申请人 SONY CORPORATION 发明人 Saito Hiromasa
分类号 H01L27/146 主分类号 H01L27/146
代理机构 Sheridan Ross P.C. 代理人 Sheridan Ross P.C.
主权项 1. A solid-state imaging apparatus, comprising: a semiconductor substrate on which a plurality of pixels is formed; an upper layer film varying in thickness and laminated on the semiconductor substrate; and on-chip lenses formed on the upper layer film so as to correspond to respective pixels, a pupil correction amount of at least one of the on-chip lenses being changed depending on a distance between a center of a pixel area and the at least one on-chip lens, and depending on the film thickness of the upper layer film at a position of the at least one on-chip lens on the upper layer film, wherein the film thickness of the upper layer film at the position of the at least one on-chip lens is the distance between the at least one on-chip lens and the semiconductor substrate.
地址 JP