Planar ion funnel

摘要

A planar ion funnel is disclosed that can be used for ion control. In one application, the planar ion funnel can be used for ion control in a mass spectrometer. The planar ion funnel can be formed on a surface of a substantially planar substrate including an orifice. An electrically conductive structure can be formed on a top surface of the substrate that surrounds the orifice. In operation, a power can be applied to the conductive structure that causes an electric field to be generated that draws ions into and through the orifice. In one embodiment, the orifice can be circular and the conductive structure can be a series of nested rings of increasing diameter surrounding the orifice.

主权项

1. A planar device for ion control in a low pressure environment comprising: a substantially planar substrate; a conductive layer formed on the planar substrate; an orifice passing through the conductive layer and the planar substrate for receiving ions; a structure for generating an electric field, said structure formed in the conductive layer in an area surrounding the orifice such that when a voltage is applied to the structure the electric field is generated that extends above a top surface of the structure that either funnels ions in a space above the top surface towards and through the orifice or disperses the ions that pass through the orifice as the ions move away from the top surface; and connectors configured to receive power for supplying a voltage to the structure to generate the electric field, wherein an entirety of the planar device lies substantially within a single plane.