3D nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication

摘要

A 3D M-CNT structure with at least one tri-state CNT NEM switch comprising at least an electrode as a source, an electrode as a gate and an electrode as a drain, a conductive carbon nanotube which is able to take three positions depending on a voltage application to said electrodes.

主权项

1. A method for producing a 3D CNT structure, wherein the method comprises the following steps:
(a) a photoresist is coated on a substrate with pre-patterned guiding electrode pairs; (b) trenches are defined between each guiding electrode pair, (c) a CNT solution is cast onto the sample surface and ac-dielectrophoresis 35 is applied between the guiding electrodes such that CNTs are attracted and trapped into the trenches; (d) a further ebeamresist layer is coated; (e) lateral gates and CNT clamp on top of the source electrode are defined by EBL and deposited by metal evaporation; (f) the structure is released by stripping the resist and dried to avoid surface tension.