发明名称 Solid-state image sensing device
摘要 A solid-state image sensing device is configured such that a first voltage is applied to a first conductivity type semiconductor region and a second voltage is applied to source-drain regions having a second conductivity type of the MOS capacitance to apply inverse bias between the semiconductor region and the source-drain regions of the MOS capacitance.
申请公布号 US9117724(B2) 申请公布日期 2015.08.25
申请号 US201514662413 申请日期 2015.03.19
申请人 Hitachi, Ltd. 发明人 Furukawa Tomoyasu;Saito Tomohiro;Nonaka Yusuke
分类号 H01L27/146;H01L29/78 主分类号 H01L27/146
代理机构 Miles & Stockbridge P.C. 代理人 Miles & Stockbridge P.C.
主权项 1. A solid-state image sensing device having a semiconductor integrated circuit (IC), comprising the IC, the IC comprising: a P type semiconductor region; a N type photodiode formed in at the semiconductor surface P well region; and a pixel including an N type floating diffusion accumulating electrons generated by the photodiode and an enhancement type metal-oxide semiconductor (MOS) capacitance, the MOS capacitance being additional capacitance of the floating diffusion, the MOS capacitance being connected to the capacitance of the floating diffusion in parallel electrically, wherein the photodiode is made of the first impurity region and the P well region, the N type floating diffusion is made of the second impurity region and the P well region, the capacitance is made of the third impurity region as a source, the fourth impurity region as a drain, and the P well region, a first gate electrode is made between the first impurity region and the second impurity region, a second gate electrode is made between the third impurity region and the fourth impurity region; the second impurity region and the second gate electrode of the MOS capacitance are connected electrically to each other; and wherein during a reset period, a reset line and a read line are high, a reset MOS and a transfer MOS are conducting, and as a result, electric charges of the photodiode and the floating diffusion are reset, thereafter, the reset line and the read line are low, and the reset MOS and the transfer MOS are not conducting, and wherein during an exposure period, photoelectric charges generated by irradiation of light are accumulated in the photodiode, thereafter, the read line is high and the transfer MOS is conductive to transmit the electric charges accumulated in the photodiode to the floating diffusion and the MOS capacitance, the floating diffusion serving as a capacitor, and the floating diffusion and the MOS capacitance accumulating the electric charges depending on a light irradiation level to the photodiode, and wherein during a read period, a selection line is high and a select MOS is conducting, a constant current source is connected to an amplifier MOS and constant current flows between a source and a drain of the amplifier MOS, a gate electrode of the amplifier MOS is connected to the floating diffusion and the MOS capacitance such that gate voltage depending on an accumulated charge quantity is applied to the amplifier MOS and a potential depending on the accumulated charge quantity is shown at the source of the amplifier MOS, and output of the amplifier MOS is read to a signal line through the select MOS as pixel information, thereafter, the reset period occurs, and wherein the MOS capacitance is an enhancement type MOS capacitance having P type source and drain regions and shows a saturation characteristic in a range of operating voltage of the sensing device, ground voltage is applied to semiconductor region, the P type source and drain regions have the ground voltage applied thereto, and the MOS capacitance has threshold voltage higher than an operating voltage of the image sensing device, thereby reducing voltage dependency of the MOS capacitance.
地址 Tokyo JP