Redundant anode sputtering method and assembly

摘要

A method is provided for coating a substrate with the aid of a magnetron cathode and two electrodes which are alternately impinged upon by a positive potential and a negative potential. Also disclosed is an assembly for coating a substrate, comprising a vacuum chamber, a magnetron cathode, two electrodes, and a voltage source. A negative potential is generated at a level that is no greater than the level of the cathode potential, thus preventing the electrode that is to be cleaned from being stripped to a greater extent than the same was coated in the previous half-wave. The magnetron cathode and the electrodes are connected to the voltage source via switching elements without being galvanically such that a negative and a positive voltage generated from the voltage source can be alternatively applied to the electrodes, the level of said voltage being no greater than the cathode voltage.

主权项

1. Device for coating a substrate by use of redundant anode sputtering, comprising: a vacuum chamber, a magnetron cathode, two electrodes and a voltage source, wherein the magnetron cathode and the electrodes are connected without electrical isolation to the voltage source by switching elements in such a manner that a negative voltage and a positive voltage, generated from the voltage source, are applied alternatingly to the electrodes, and a level of said negative voltage and said positive voltage is no greater than a cathode voltage, and wherein the voltage source comprises an alternating voltage source with a first voltage output and a second voltage output; the first voltage output is connected to a cathode of a first diode; and the second voltage output is connected to a cathode of a second diode; and anodes of the first diode and the second diode are connected together to the magnetron cathode; and the first voltage output is connected to the first electrode of the two electrodes by a third diode, which when the first voltage output is a positive voltage, is poled in a flow direction, and which is bridged with a first resistor; and the second voltage output is connected to the second electrode of the two electrodes by a fourth diode, which when the second voltage output is a positive voltage, is poled in the flow direction, and which is bridged with a second resistor.